Control arrangement for microelectromechanical devices and systems
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United States of America Patent
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Aug 14, 2001
Grant Date -
N/A
app pub date -
Sep 21, 1999
filing date -
Sep 21, 1999
priority date (Note) -
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status (Latency Note)
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Abstract
A microelectromechanical system in which, operationally independent of the movable element and the component for moving it, a microelectromechanical sensor senses the position of the movable element. The microelectromechanical sensor adjoins the movable element, at least in part, and may be a strain gage, or a gage of a capacitive, piezoelectric, piezoresistive, or pressure type, among others. The resulting signal is fed back to control the component for moving the movable element. In an array of movable elements and sensors, the signal of each sensor is specific to one movable element.
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