Gas passage with selectively acting penetration surface and process for producing the penetration surface

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United States of America Patent

PATENT NO 6277177
SERIAL NO

08973930

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Abstract

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A gas passage (1) with a selectively acting penetration surface consisting of quartz, quartz glass, Pyrex glass or the like; in order to provide penetration surfaces which are relatively thin on the one hand but will withstand relatively great pressure differences on the other, it is proposed that the selectively acting penetration surface take the form of a plurality of adjacent windows (5).

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Patent Owner(s)

Patent OwnerAddress
LEYBOLD VAKUUM GMBHAGGERSTRASSE 24 KOLN DE 50859

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bley, Werner Grosse Bonn, DE 9 54
Bohm, Thomas Cologne, DE 54 402
Dobler, Ulrich Wermelskirchen, DE 7 60
Lacher, Manfred Mainz, DE 4 88
Zetterer, Thomas Engelstadt, DE 17 104

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