Substrate support for a thermal processing chamber

United States of America Patent

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Aug 28, 2001
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N/A
app pub date
Apr 1, 1998
filing date
Apr 1, 1998

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Expired

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Abstract

A substrate support, such as an edge ring, includes an inner portion, and an outer portion contiguous with the inner portion and extending radially outward therefrom. The inner portion has a raised annular extension forming a ridge for supporting a substrate.

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Patent Owner(s)

Patent Owner	Address
APPLIED MATERIALS INC	3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

F27D:DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, ....

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Inventor Name	Address	# of filed Patents	Total Citations
Mayur, Abhilash	Sunnyvale, CA	12	153
Stern, Lewis A	Williston, VT	3	88
White, Anthony	Cupertino, CA	16	226

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Substrate support for a thermal processing chamber

Number of patents in Portfolio can not be more than 2000

United States of America Patent

09053290

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PATENT NO	6280183
SERIAL NO	09053290
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09053290

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