Tip portion structure of high-frequency probe and method for fabrication probe tip portion composed by coaxial cable
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United States of America Patent
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Aug 28, 2001
Grant Date -
N/A
app pub date -
Jun 9, 1999
filing date -
Jun 9, 1998
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Abstract
In a tip portion structure basically having a substrate, a plate spring, and a ground block, the substrate is attached to a signal line on a back surface of the substrate and is contacted on the tip with the signal electrode of the DUT placed on a device stage. The plate spring is made of a resilient material, placed on the front side of the substrate, and positioned to apply a pressure to the substrate. The ground block is positioned between the signal line and the device stage functioned as a ground electrode of the DUT. Alternatively, the tip portion structure further may have a ground plate or a ground surface formed of a conductive thin plate covering entirely the front surface of the substrate, and shaped to surround the signal line in cooperation with the ground block . A plurality of the signal lines may be arranged in parallel on the same plane of the substrate. Another tip portion structure is based on a coaxial cable to be cut from the center at a plane perpendicular to the axial direction thereof along one or more oblique plane. A metal ring fitted over a periphery of the coaxial outer conductor may be used.
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- 15 United States
- 10 France
- 8 Japan
- 7 China
- 5 Korea
- 2 Other
Patent Owner(s)
- NEC CORPORATION
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Hayakawa, Satoshi | Kanagawa, JP | 60 | 973 |
Inoue, Hirobumi | Tokyo, JP | 14 | 414 |
Matsunaga, Kouji | Tokyo, JP | 32 | 918 |
Nikaidou, Masahiko | Tokyo, JP | 5 | 230 |
Tanehashi, Masao | Tokyo, JP | 7 | 333 |
Taura, Toru | Tokyo, JP | 21 | 587 |
Yamagishi, Yuuichi | Osaka, JP | 5 | 333 |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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