Fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement
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United States of America Patent
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Aug 28, 2001
Grant Date -
N/A
app pub date -
Apr 8, 1998
filing date -
Apr 9, 1997
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A fiber optic fiber Fabry-Perot interferometer diaphragm sensor and method of measurement is provided. A fiber Fabry-Perot interferometer diaphragm sensor (12a, 12b, 12c) includes a base (54a, 54b, 54c) and a diaphragm (52a, 52b, 52c) with an optic fiber (30) coupled under tension between the base (54a, 54b, 54c) and the diaphragm (52a, 52b, 52c). A fiber Fabry-Perot interferometer element (40) is contained within the optic fiber (30) and operates to sense movement of the diaphragm (52a, 52b, 52c). In a particular embodiment, the diaphragm (52a) moves in response to a pressure (P) applied to the diaphragm (52a). In another embodiment, a proof mass (72) is coupled to the diaphragm (52b) such that the diaphragm (52b) moves in response to an acceleration (A). In yet another embodiment, a magnetic body (80) is coupled to the diaphragm (52c) such that the diaphragm (52c) moves in response to a magnetic field (M).
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