Anti-reflective coatings for spatial light modulators
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United States of America Patent
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Aug 28, 2001
Grant Date -
N/A
app pub date -
May 6, 1999
filing date -
May 14, 1998
priority date (Note) -
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Abstract
A spatial light modulator with an anti-reflective coating (ARC) 100 integrated into its structure. The manufacturing of the device is altered to include deposition of an ARC 100, and any necessary patterning and etching to allow the elements of the array to operate properly. The ARC could reside in several places of the element structure including over the addressing circuitry 26, over a middle layer 32 or on the underside of the reflective structure 10. Micromechanical spatial light modulators, as well as non-moving modulators, such as reflective and transmissive LCD modulators can use the invention.
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