System and method for providing an integrated gas stick
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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Sep 4, 2001
Grant Date -
N/A
app pub date -
Mar 31, 2000
filing date -
Mar 31, 2000
priority date (Note) -
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Abstract
The present invention discloses a gas delivery apparatus for control of process and purge gases is disclosed that is suitable for use in a semiconductor processing system. The gas delivery apparatus includes a base plate integrating a printed circuit board and a heating layer. In addition, the gas delivery apparatus includes a plurality of gas stick components mounted on the base plate. Specific gas components are coupled to the integrated printed circuit board, which provides an electrical interface to the control electronics.
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