Apparatus for storing and moving a cassette
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United States of America Patent
Stats
-
Sep 4, 2001
Grant Date -
N/A
app pub date -
Dec 1, 1998
filing date -
Dec 1, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A cassette stocker includes a plurality of cassette storage shelves positioned adjacent a cleanroom wall above a cassette docking station, and a cassette mover to carry a cassette between the shelves and the docking station. An interstation transfer apparatus includes an overhead support beam and a transfer arm adapted to carry a cassette between processing stations.
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