Black mask, color filter and liquid crystal display
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United States of America Patent
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Sep 4, 2001
Grant Date -
N/A
app pub date -
Nov 3, 1998
filing date -
Nov 7, 1997
priority date (Note) -
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status (Latency Note)
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Abstract
A black mask comprises: a first and a second antireflection films each comprising oxide, nitride, carbide, oxide nitride, oxide carbide, nitride carbide, or oxide nitride carbide of at least one kind of metal selected from the group consisting of chromium, molybdenum, tungsten, nickel, and germanium, and said films each having a different composition; and a screening film comprising at least one kind of metal selected from the group consisting of chromium, molybdenum, tungsten, nickel, and germanium; wherein said three films are successively formed on a transparent substrate, and at least one but not all of said three films contains chromium. Having improved etching characteristics at the manufacturing process, low reflectivity in the whole visible wavelength range, and a small wavelength dependence of reflectivity, the black mask can be preferably used for a color filter and a liquid crystal display which can show clear pictures.
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