Light modulation element, array-type light modulation element, and flat-panel display unit
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United States of America Patent
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Sep 11, 2001
Grant Date -
N/A
app pub date -
Oct 5, 1999
filing date -
Oct 5, 1998
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A light modulation element which has a transparent substrate 111 transparent for modulated light, a moving grid 114 comprising a plurality of slits 113 formed by arranging a plurality of grid plates 112 each having a shield property and spaced from each other, the moving grid 114 having at least a part having electrical conductivity, elastic support members for placing the moving grid 114 with a predetermined spacing on the transparent substrate 111 and supporting the moving grid 114 movably in an arrangement direction of the grid plates 112, shield films 119 formed at the positions of the transparent substrate 111 overlapping the slit positions of the moving grid 114, and moving grid move means for moving the moving grid 114 in the arrangement direction of the grid plates 112 by an electrostatic force generated by applying predetermined drive voltages to fixed electrodes placed on the transparent substrate 111 and the moving grid 114.
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