Hermetically sealed semiconductor inertial sensor
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Sep 18, 2001
Grant Date -
N/A
app pub date -
Dec 9, 1997
filing date -
Dec 24, 1996
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An inertial sensor has a sensing element formed on one surface of a chip of semiconductor material and which is movable with respect to the chip. The sensing element is enclosed in a sealed hollow structure, in which the hollow structure includes a metal wall disposed on the surface around the sensing element, and a closure plate fixed to the wall.
First Claim
Family
International Classification(s)
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully