Solvent systems for low dielectric constant polymeric materials
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United States of America Patent
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Sep 18, 2001
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N/A
app pub date -
Jan 21, 1999
filing date -
Feb 3, 1998
priority date (Note) -
Expired
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Abstract
A polymeric low dielectric constant solution includes a low dielectric constant polymer dissolved in an aromatic aliphatic ether solvent. The polymer preferably is a poly(arylene ether) and the solvent preferably is anisole, methylanisole, phenetole or mixtures thereof. A process for forming a dielectric film on a substrate by spin-coating the polymeric solution is also provided.
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