System and method for measuring object features with coordinated two and three dimensional imaging

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United States of America Patent

PATENT NO 6291816
SERIAL NO

09327817

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Abstract

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A system and method are disclosed for highly efficient imaging of selected object features utilizing, in combination, a 2D imaging subsystem and a 3D imaging subsystem wherein data from the 2D imaging subsystem is used to predetermine areas containing 3D features of interest such that delay attributable to imaging of areas of non-interest for 3D features is minimized.

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Patent Owner(s)

Patent OwnerAddress
RUDOLPH TECHNOLOGIES INCONE RUDOLPH ROAD FLANDERS NJ 07836

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Liu, Kuo-Ching New York, NY 56 714

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