Method of making a fluid flow module
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United States of America Patent
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Sep 25, 2001
Issued Date -
N/A
app pub date -
Apr 26, 2000
filing date -
Jul 21, 1997
priority date (Note) -
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Abstract
A method of fabricating a module having fluid flow channels in communication with a diaphragm valve using self-bondable polyimide sheets wherein the sheets are directly interfacially bonded to one another except in the region corresponding to the diaphragm valve without using an adhesive is disclosed.
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