Substrate processing apparatus
Number of patents in Portfolio can not be more than 2000
United States of America Patent
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-
Sep 25, 2001
Grant Date -
N/A
app pub date -
Jun 29, 2000
filing date -
Jul 2, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A substrate processing apparatus comprising a substrate carrying section which carries in and out the substrate, a processing section including a plurality of processing units which are vertically stacked and subject the substrate to various kinds of processing, a main transfer machine which freely moves in a vertical direction in the processing section, for transferring the substrate from one of the processing units to another of the processing units, and a secondary transfer machine which freely moves in a vertical direction in the substrate carrying section, for delivering the substrate between the substrate carrying section and the processing section and transferring the substrate from one processing unit to another processing unit in the processing section when not delivering the substrate.
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