Method of manufacture of a thermoelastic bend actuator ink jet printer
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United States of America Patent
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-
Sep 25, 2001
Grant Date -
N/A
app pub date -
Jul 10, 1998
filing date -
Jul 15, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method of manufacturing an ink jet printhead includes providing a substrate. A doped layer is deposited on the substrate and is etched to create an array of nozzles on the substrate with a nozzle chamber in communication with each nozzle. Planar monolithic deposition, lithographic and etching processes are used to form a thermoelastic bend actuator arranged in the nozzle chamber and being displaceable, when activated, towards the nozzle to effect ink ejection, at least that surface of the actuator facing a floor of the nozzle chamber being hydrophobic to facilitate the formation of an air bubble between the actuator and the floor.
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