Integrated thin-film solar battery
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United States of America Patent
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Sep 25, 2001
Grant Date -
N/A
app pub date -
Feb 23, 2000
filing date -
Feb 25, 1999
priority date (Note) -
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Abstract
A sputtering-deposition method usable in forming on an insulator substrate a film including a conductive layer includes the steps of: preparing a conductive substrate holder in the form of a frame having an opening at its central area and electrically grounded; positioning the insulator substrate to cover the opening of the holder; arranging a flexible spacer on a peripheral edge of the substrate and also superposing a back plate on the spacer to press the substrate against the holder via the spacer; pressing and fixing the back plate to the holder; and then sputtering a separately provided target to deposit a new layer on a region of the substrate exposed in the holder's opening.
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