Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer
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United States of America Patent
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Sep 25, 2001
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app pub date -
Dec 22, 1999
filing date -
Dec 22, 1999
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Abstract
A microelectromechanically tunable Fabry-Perot spectrophotometer is provided for color sensing. Optical fiber provides light input to a Fabry-Perot filter which is adjusted by a switched capacitor circuit. Spectral intensity is sensed by an integrated photodetector.
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