Reactive ion etching method of fabricating nozzles for aerosolized delivery of therapeutic or diagnostic agents

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United States of America Patent

PATENT NO 6295986
SERIAL NO

09482393

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Abstract

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A method for producing a nozzle useful in generating a fine aerosol for delivery of a therapeutic or diagnostic agent is provided. The method comprises treating a thin, preferably flexible material having partially formed nozzles with a plasma which alters the size and shape of the nozzles. The pores in the nozzles so formed preferably have an unflexed exit aperture diameter in the range of about 0.5 to about 25 microns, depending on the size of the aerosol particles desired for a given application. The pores in the nozzles can have a variety of shapes and can be distributed in a variety of patterns. An elevated area can be formed around the exit aperture of the nozzle in order to prevent intrusion of liquid back into the nozzle. A method of producing an aerosolization device incorporating such a nozzle is also provided.

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Patent Owner(s)

Patent OwnerAddress
ARADIGM CORPORATION26219 EDEN LANDING ROAD HAYWARD CA 94545

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Patel, Rajesh S Fremont, CA 29 887
Srinivasan, Sudarsan Fremont, CA 66 538

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