Robot having independent end effector linkage motion
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United States of America Patent
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Oct 2, 2001
Issued Date -
N/A
app pub date -
Jul 6, 2000
filing date -
Jul 6, 2000
priority date (Note) -
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status (Latency Note)
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Abstract
A substrate handling system comprises a robot containing mico-environment in communication with a plurality of processing stations. The robot has a robot arm comprising an end effector linkage mounted to an extensible linkage. Each of the linkages is independently actuatable using an associated motor, with the extensible linkage serving to convey the end effector linkage to the vicinity of a target processing station for delivery or retrieval of a substrate. Motion of the linkages may be synchronized to reduce travel time, and multiple end effectors may be mounted to the extensible linkage for increasing throughput.
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