Lithographic printing method using a low surface energy layer
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United States of America Patent
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Oct 9, 2001
Grant Date -
N/A
app pub date -
Nov 24, 1998
filing date -
Nov 24, 1998
priority date (Note) -
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Abstract
A method of contact printing on a device using a partially transparent mask (18) having first and second surfaces, comprises the steps of applying a layer of low surface energy polymeric material (22) to the first surface of the mask; placing the first surface (24) of the mask contiguous to the device (10), the layer of low surface energy polymeric material being substantially in contact with the device; and applying radiation (32) to the second surface of the mask for affecting a pattern in the device.
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