Lubricant delivery for micromechanical devices
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United States of America Patent
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Oct 9, 2001
Grant Date -
N/A
app pub date -
Nov 8, 1999
filing date -
Nov 16, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A method of dispensing a lubricant into a micromechanical device package and a micromechanical device package containing the lubricant. The method comprises the steps of mixing (102) the lubricant, typically a perfluoroalkanoic acid such as perfluorodecanoic acid with a suitable solvent, typically an ether solvent such as tetrahydrofuran or tert-butyl methyl ether. The mixture is allowed to equilibriate (104) before being filtered (106) to remove solid particles. The filtered solution is applied (108) to a surface that will be on the interior of the package, typically the ceramic substrate. The deposited mixture is then cured (110) to remove most, if not all, of the solvent, and the package is sealed (112).
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