Method for determining a profile quality grade of an inspected feature
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United States of America Patent
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Oct 16, 2001
Grant Date -
N/A
app pub date -
Nov 17, 1998
filing date -
Nov 17, 1998
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Abstract
A method for determining a profile quality grade of inspected feature in a resist. The feature includes side walls. The method includes the steps of acquiring by a metrology device a signal that originates from the feature and analyzing the acquired signal, including fitting a curve from among a family of curves to the acquired signal. The curve is subjected to the following constraint: it corresponds to a signal portion that originates from part of the bottom of the feature. The method further includes the step of determining the profile quality grade of the feature depending upon characteristics of the fitted curve.
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