Method for forming a gate electrode on a semiconductor substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6306743
SERIAL NO

09798942

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Abstract

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A method for forming a gate electrode on a semiconductor substrate that includes forming a gate insulating layer on a semiconductor substrate, forming a polysilicon layer on the semiconductor substrate, forming a tungsten silicide layer on the polysilicon layer, forming a diffusion barrier layer on the tungsten silicide layer, forming a tungsten layer on the diffusion barrier layer, crystallizing the diffusion barrier layer, forming a first insulating layer on the tungsten layer, forming a gate electrode, forming an oxide layer, and forming a second insulating layer.

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Patent Owner(s)

Patent OwnerAddressTotal Patents
CONVERSANT INTELLECTUAL PROPERTY MANAGEMENT INC.OTTAWA ONTARIO, CA1400

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Byung Hak Chungchongbuk-do, KR 15 147

Cited Art Landscape

Patent Info (Count) # Cites Year
 
ADVANCED MICRO DEVICES, INC. (1)
* 6180469 Low resistance salicide technology with reduced silicon consumption 27 1998
 
POLARIS INNOVATIONS LIMITED (1)
* 5804499 Prevention of abnormal WSi.sub.x oxidation by in-situ amorphous silicon deposition 32 1996
 
SIEMENS AKTIENGESELLSCHAFT (1)
* 6110812 Method for forming polycide gate 9 1999
 
UNITED MICROELECTRONICS CORP. (1)
* 5874353 Method of forming a self-aligned silicide device 36 1997
 
APPLIED MATERIALS, INC. (1)
* 6162715 Method of forming gate electrode connection structure by in situ chemical vapor deposition of tungsten and tungsten nitride 77 1998
 
GLOBALFOUNDRIES INC. (1)
* 5923999 Method of controlling dopant diffusion and metal contamination in thin polycide gate conductor of mosfet device 49 1996
 
KABUSHIKI KAISHA TOSHIBA (1)
* 6165883 Method for forming multilayer sidewalls on a polymetal stack gate electrode 20 1999
 
HYNIX SEMICONDUCTOR INC. (1)
* 6194294 Method of forming gate electrode in semiconductor device 7 1999
 
VANGUARD INTERNATIONAL SEMICONDUCTOR CORPORATION (1)
5933741 Method of making titanium silicide source/drains and tungsten silicide gate electrodes for field effect transistors 34 1997
 
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. (1)
* 6218252 Method of forming gate in semiconductor device 7 1999
 
APTINA IMAGING CORPORATION (1)
* 6198144 Passivation of sidewalls of a word line stack 55 1999
 
LG Semicon Co., Ltd. (2)
* 6096630 Method for fabricating semiconductor device 25 1997
* 6103609 Method for fabricating semiconductor device 20 1998
* Cited By Examiner

Patent Citation Ranking

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Patent Info (Count) # Cites Year
 
TOSHIBA MEMORY CORPORATION (1)
* 6730581 Semiconductor device and method of manufacture thereof 13 2001
 
Other [Check patent profile for assignment information] (1)
* 2005/0164,441 Semiconductor device and process for producing the same 3 2005
 
CYPRESS SEMICONDUCTOR CORPORATION (2)
8252640 Polycrystalline silicon activation RTA 0 2006
8445381 Oxide-nitride stack gate dielectric 0 2007
 
CANON ANELVA CORPORATION (2)
7816283 Method of depositing a higher permittivity dielectric film 0 2005
* 2005/0272,196 Method of depositing a higher permittivity dielectric film 6 2005
 
NANYA TECHNOLOGY CORPORATION (5)
* 7022603 Method for fabricating semiconductor device having stacked-gate structure 0 2003
* 2005/0020,044 Method for fabricating semiconductor device having stacked-gate structure 0 2003
* 7101777 Methods for manufacturing stacked gate structure and field effect transistor provided with the same 4 2004
* 2005/0074,957 Methods for manufacturing stacked gate structure and field effect transistor povided with the same 4 2004
* 7375017 Method for fabricating semiconductor device having stacked-gate structure 1 2006
 
BRIGHAM YOUNG UNIVERSITY (1)
* 2006/0024,959 Thin tungsten silicide layer deposition and gate metal integration 16 2005
 
MICRON TECHNOLOGY, INC. (5)
7019351 Transistor devices, and methods of forming transistor devices and circuit devices 60 2003
* 2004/0180,487 Transistor devices, CMOS constructions, capacitor constructions, and methods of forming transistor devices and capacitor constructions 9 2003
7253053 Methods of forming transistor devices and capacitor constructions 8 2004
* 7081656 CMOS constructions 6 2004
7126181 Capacitor constructions 2 2004
 
SAMSUNG ELECTRONICS CO., LTD. (10)
* 7501673 Semiconductor device multilayer structure, fabrication method for the same, semiconductor device having the same, and semiconductor device fabrication method 2 2005
* 2006/0223,249 Semiconductor device multilayer structure, fabrication method for the same, semiconductor device having the same, and semiconductor device fabrication method 1 2005
7544597 Method of forming a semiconductor device including an ohmic layer 0 2006
* 2006/0180,875 Ohmic layer, semiconductor device including an ohmic layer, method of forming an ohmic layer and method of forming a semiconductor device including an ohmic layer 5 2006
* 2006/0186,491 Methods of forming semiconductor devices having metal gate electrodes and related devices 2 2006
* 2006/0163,677 Methods of forming a semiconductor device having a metal gate electrode and associated devices 3 2006
7439176 Semiconductor device multilayer structure, fabrication method for the same, semiconductor device having the same, and semiconductor device fabrication method 1 2006
* 2006/0223,252 SEMICONDUCTOR DEVICE MULTILAYER STRUCTURE, FABRICATION METHOD FOR THE SAME, SEMICONDUCTOR DEVICE HAVING THE SAME, AND SEMICONDUCTOR DEVICE FABRICATION METHOD 2 2006
* 2009/0101,984 Semiconductor device having gate electrode including metal layer and method of manufacturing the same 2 2007
7875939 Semiconductor device including an ohmic layer 1 2009
 
ACCIAI SPECIALI TERNI S.P.A. (1)
6488784 Process for the production of grain oriented electrical steel strips 2 2000
 
SK HYNIX INC. (1)
9064854 Semiconductor device with gate stack structure 0 2013
 
SANDISK TECHNOLOGIES LLC (1)
9401279 Transistor gate and process for making transistor gate 0 2013
 
MONTEREY RESEARCH, LLC (2)
* 8080453 Gate stack having nitride layer 0 2002
7256083 Nitride layer on a gate stack 0 2002
 
PS4 LUXCO S.A.R.L. (2)
* 6800543 Semiconductor device having a low-resistance gate electrode 12 2002
* 2003/0170,942 Semiconductor device having a low-resistance gate electrode 3 2002
 
WATERS TECHNOLOGIES CORPORATION (1)
* 2008/0224,208 Semiconductor device and method for fabricating the same 1 2007
 
APPLIED MATERIALS, INC. (1)
* 6534401 Method for selectively oxidizing a silicon/metal composite film stack 15 2000
 
RENESAS ELECTRONICS CORPORATION (4)
6750503 Stacked gate electrode for a MOS transistor of a semiconductor device 2 2001
* 2001/0030,342 Semiconductor device and process for producing the same 4 2001
* 6774442 Semiconductor device and CMOS transistor 7 2001
* 6677230 Method of manufacturing semiconductor device 28 2002
 
LONGITUDE SEMICONDUCTOR S.A.R.L. (2)
* 7078777 Semiconductor device having a low-resistance gate electrode 0 2004
* 2005/0020,045 Semiconductor device having a low-resistance gate electrode 0 2004
 
HYNIX SEMICONDUCTOR INC. (15)
* 6713372 Method for manufacturing synchronous DRAM device 2 2002
* 7687389 Method for fabricating semiconductor device 3 2006
* 2007/0066,013 Method for fabricating semiconductor device 8 2006
* 7960268 Method for forming gate having metal layer in semiconductor device 0 2006
* 2007/0126,065 Semiconductor device and method of manufacturing the same 1 2006
7781333 Semiconductor device with gate structure and method for fabricating the semiconductor device 0 2007
7902614 Semiconductor device with gate stack structure 1 2007
8008178 Method for fabricating semiconductor device with an intermediate stack structure 1 2007
* 2008/0160,746 METHOD FOR FABRICATING SEMICONDUCTOR DEVICE WITH GATE STACK STRUCTURE 1 2007
* 7989281 Method for manufacturing dual gate in semiconductor device 0 2008
* 2009/0093,097 Method for Manufacturing Dual Gate in Semiconductor Device 2 2008
8319341 Semiconductor device with gate structure 0 2010
8441079 Semiconductor device with gate stack structure 1 2011
* 8247878 Semiconductor device and method of manufacturing the same 0 2011
* 2011/0241,107 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME 0 2011
 
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. (1)
* 6593219 Method for fabricating electrode structure and method for fabricating semiconductor device 5 2001
 
HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. (2)
* 6528404 Semiconductor device and fabrication method thereof 4 2001
* 6599821 Method for fabricating conductive line pattern for semiconductor device 3 2001
* Cited By Examiner