Fluorinated solvent compositions containing hydrogen fluoride

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United States of America Patent

PATENT NO 6310018
SERIAL NO

09541453

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Abstract

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A homogeneous compositions containing a fluorinated solvent, hydrogen fluoride, and a co-solvent, and the use of these compositions for cleaning and etching of substrates is described.

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Patent Owner(s)

Patent OwnerAddress
3M INNOVATIVE PROPERTIES COMPANYP O BOX 33427 ST PAUL MN 55133-3427

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Behr, Frederick E Woodbury, MN 24 418
Parent, Michael J Oakdale, MN 23 379
Rajtar, Paul E Hugo, MN 6 117
Zazzera, Lawrence A Edina, MN 9 203

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