Importance

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Abstract

A micro-accelerometer having three micromachined conducting-silicon plates bonded in superposition with the interposition of insulating layers. The central plate includes a subassembly sensitive to acceleration, and a peripheral frame electrically insulated from the subassembly and surrounding the subassembly. The peripheral frame forms a spacer between a lower plate and an upper plate from which it is also electrically insulated. The subassembly includes a base fixed on the lower plate and a cantilevered proof mass suspended from the base, an electrical connection being made between the lower plate and the base of the subassembly. The suspension of the proof mass includes, on the one hand, a central vibrating beam which is connected to the proof mass and to the base and is placed substantially in the horizontal plane of an upper face of the proof mass and, on the other hand, two short side suspension arms which are connected to the base and are placed on either side of the central beam but in a horizontal plane passing substantially through the center of gravity of the proof mass. Such a micro-accelerometer may find application for an aircraft, in the context of assisting with inertial navigation.

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First Claim