Control system and method for providing variable ramp rate operation of a thermal cycling system
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United States of America Patent
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Nov 6, 2001
Issued Date -
N/A
app pub date -
Nov 2, 1999
filing date -
Aug 18, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A control system and method for variable ramp rate operation of a heater or integrated heating and cooling plate is provided. The control system obtains a calibration signal for a specific thermal cycling profile and for a specific heater, by exposing a calibration wafer having temperature sensors coupled thereto to a predetermined thermal cycling profile. During the calibration process, the temperature sensed by one or more sensors positioned on the heater, or on a thermally conductive plate coupled to the heater is recorded, as is the signal output to the heater. Preferably the position of the wafer relative to the heating mechanism, and the flow of cooling fluid to the heating mechanism are also recorded as part of the calibration signal. When the calibration signal is executed during production processing, the heating mechanism, fluid flow and/or lift pin position can be adjusted based on feedback from the temperature sensors positioned on the heater or on the conductive plate.
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