Liquid crystal display fabrication process using a final rapid thermal anneal
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United States of America Patent
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Nov 6, 2001
Grant Date -
N/A
app pub date -
Sep 1, 1999
filing date -
Sep 1, 1999
priority date (Note) -
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Abstract
A process flow for forming a pixel cell for a light valve implements the furnace alloy/sintering step prior to deposition of the reflective metal layer from which the active pixel electrodes are to be formed. In this manner, the active pixel electrodes are spared loss of reflectance associated with prolonged exposure to high temperatures of the furnace alloy/sintering step. Adequate suppression of surface state charges created after the furnace alloy/sintering is ensured by performing a rapid thermal anneal at the conclusion of the process flow.
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