Optical mirror system with multi-axis rotational control
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United States of America Patent
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Nov 20, 2001
Grant Date -
N/A
app pub date -
Jun 9, 2000
filing date -
Jun 9, 2000
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
An optical mirror system in accordance with the present invention is disclosed. The optical mirror system comprises a mirror frame and an optical surface coupled to the mirror frame. The mirror system further includes an electrostatic shield coupled to optical surface and the mirror frame and an electrode system for causing the optical surface to be rotated without being deformed. In operation, primary and secondary electrodes are utilized. Differential capacitive sensing may be used to reduce the noise in the sense signal. The mirror can be fabricated using standard surface-micromachining processes, and aside from one-time assembly operations, the device has no frictional wear.
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