Substrate transfer apparatus and substrate processing apparatus
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United States of America Patent
Stats
-
Nov 20, 2001
Grant Date -
N/A
app pub date -
May 14, 1999
filing date -
May 15, 1998
priority date (Note) -
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status (Latency Note)
Importance
Abstract
This invention related to a substrate transfer apparatus having an arm holder moving into and out of a cassette while a substrate is mounted thereon, a forward and backward driving mechanism for moving the arm holder forward and backward, and a contact support member for supporting the substrate in contact with a lower surface peripheral portion of the substrate placed on the arm holder, said contact support member comprising a first defining portion for defining a front end of the substrate placed on the arm holder, and a second defining portion facing the first defining portion, for defining a rear end of the substrate placed on the arm holder.
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