Importance

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Abstract

The invention provides apparatus for testing a substrate having a plurality of terminals. The apparatus includes a frame, a first arrangement secured to the frame, a mounting arrangement secured to the frame, and a second arrangement secured to the mounting arrangement. One of the first and second arrangements is a holder capable of holding the substrate so that the terminals are located in the first plane. The other one of the first and second arrangements is a probe card including a probe card backing member and a plurality of probes extending from the probe card backing member, the probes having contact regions located in a second plane. The mounting apparatus includes at least a first member which is adjustable relative to the frame so as to pivot the second arrangement relative to the first arrangement between an orientation wherein there is an angle between the first and second planes and an orientation wherein the first and second planes are substantially parallel to one another. The first and second arrangements are movable relative to one another between a position wherein the contact regions are spaced from the terminals and a position wherein each contact region contacts a respective one of the terminals.

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First Claim