US Patent No: 6,322,116
Number of patents in Portfolio can not be more than 2000
Non-contact end effector
Stats
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Nov 27, 2001
Issued date -
Jul 23, 1999
filing date -
09/361,037
serial no -
In Force
status
Importance
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Abstract
A device that supports a substrate in a non-containing manner so as to controllably move the substrate within a substrate processing system. The device includes an end effector carrying support pads each having a vertical gas outlet and a horizontal outlet communicating with a gas supply to form a plurality of vertical gas jets and a plurality of horizontal gas jets. The vertical gas jets impinge on a lower surface of the substrate to urge the substrate into a fixed vertical position with respect to the support pads and the horizontal gas jets impinge on the substrate edge to urge the substrate into a fixed horizontal position with respect to the pads.
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First Claim
Related Publications
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International Classification(s)
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Cited Art
| Patent Info | (Count) | # Cites | Year |
|---|---|---|---|
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| 5,746,460 End effector for semiconductor wafer transfer device and method of moving a wafer with an end effector | 61 | 1995 | |
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| 5,324,155 Wafer handling system with bernoulli pick-up | 53 | 1992 | |
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| 4,773,687 Wafer handler | 41 | 1987 | |
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| 4,738,748 Plasma processor and method for IC fabrication | 82 | 1984 | |
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| 4,667,076 Method and apparatus for microwave heat-treatment of a semiconductor water | 22 | 1985 | |
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| 4,257,637 Contactless air film lifting device | 17 | 1979 | |
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| 6,099,056 Non-contact holder for wafer-like articles | 38 | 1998 | |
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| 5,169,196 Non-contact pick-up head | 43 | 1991 | |
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| 5,765,890 Device for transferring a semiconductor wafer | 12 | 1996 | |
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| 5,765,889 Wafer transport robot arm for transporting a semiconductor wafer | 53 | 1996 | |
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| 5,967,578 Tool for the contact-free support of plate-like substrates | 23 | 1998 | |
Patent Citation Ranking
Maintenance Fees
| Fee | Large entity fee | small entity fee | micro entity fee | due date |
|---|---|---|---|---|
| 11.5 Year Payment | $7400.00 | $3700.00 | $1850.00 | May 27, 2013 |
| Fee | Large entity fee | small entity fee | micro entity fee |
|---|---|---|---|
| Surcharge - 11.5 year - Late payment within 6 months | $160.00 | $80.00 | $40.00 |
| Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
| Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |