Conditioning fixed abrasive articles
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United States of America Patent
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-
Nov 27, 2001
Grant Date -
N/A
app pub date -
Apr 30, 1999
filing date -
Apr 30, 1999
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The useful lifetime of a fixed abrasive article is extended and wafer-to-wafer uniformity enhanced by preconditioning a fixed abrasive element and/or periodic conditioning after initial wafer polishing. Embodiments include preconditioning by forced removal of an upper binder-rich portion of the fixed abrasive elements to expose abrasive particles having a similar concentration as the bulk concentration at about one half the height of the elements. Embodiments further include periodic conditioning after initial wafer polishing by forced removal of an upper portion of the fixed abrasive elements.
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