Process for etching silicon-containing material on substrates
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United States of America Patent
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Nov 27, 2001
Issued Date -
N/A
app pub date -
Jul 16, 1998
filing date -
Nov 12, 1997
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Abstract
A method of etching a silicon-containing layer 170 on a substrate 45 comprises the steps of placing the substrate 45 on a support 75 in a process chamber 50. The substrate 45 is exposed to an energized process gas comprising a bromine-containing gas, a chlorine-containing gas, an inorganic fluorinated gas, and an oxygen gas. The volumetric flow ratio of the gas constituents is selected so that the energized process gas etches regions 180a,b having different concentrations of dopant in the polysilicon layer 170 at substantially the same etching rate. Optionally, the gas composition is also tailored to simultaneously clean off etch residue from the internal surfaces of a process chamber 50 during etching of the substrate 45.
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Patent Owner(s)
- APPLIED MATERIALS, INC.
International Classification(s)
Inventor(s)
Inventor Name | Address | # of filed Patents | Total Citations |
---|---|---|---|
Chinn, Jeffrey | Foster City, CA | 17 | 785 |
Nallan, Padmapani | Sunnyvale, CA | 19 | 500 |
Yuen, Stephen | Santa Clara, CA | 15 | 943 |
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Surcharge after expiration - Late payment is unavoidable | $700.00 | $350.00 | $175.00 |
Surcharge after expiration - Late payment is unintentional | $1,640.00 | $820.00 | $410.00 |
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