Method of characterizing photolithographic tool performance and photolithographic tool thereof
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United States of America Patent
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Nov 27, 2001
Grant Date -
N/A
app pub date -
Apr 27, 1998
filing date -
Apr 27, 1998
priority date (Note) -
Expired
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Abstract
A method of characterizing photolithographic tool performance is presented. Variations in performance over an image or exposure field are evaluated and contributions to the variation due to the partial coherence factor of the tool separated from other contributing factors. Methods of determining the relative magnitude of these variations is provided and a photolithographic tool that incorporates these methods described.
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