Laser processing of a thin film
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United States of America Patent
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-
Nov 27, 2001
Grant Date -
N/A
app pub date -
Jun 4, 1999
filing date -
Jan 13, 1999
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
Method and apparatus for processing a workpiece having a thin film layer using laser pulses generated by a plurality of lasers. The lasers are equipped with Q-switches and triggered by a Q-switch trigger device at controlled pulse frequencies and delays with respect to one another. The laser pulses from the plurality of lasers are directed to the same processing spot on the workpiece to generate a combined laser beam, and the workpiece is moved relative to the laser beam to process the thin film with the laser pulses. The method and apparatus increase the processing speed and accomplish multiple-step processing in a single pass. Application of the invention in the fabrication of thin film solar cells is described.
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