Pressure sensor support base with cavity
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 4, 2001
Issued Date -
N/A
app pub date -
Jul 15, 1999
filing date -
Mar 20, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A capacitive pressure sensor capsule having a support base with a cavity is provided. The capsule includes a housing having a ceramic cover sealingly attached to a ceramic base to define an interior chamber. The base has a cavity facing this interior chamber and at least one hole adjacent the cavity that extends through the base. A glass sensor has a first diaphragm with a first electrode and a second diaphragm with a second electrode bonded together to form a capacitor and is mounted in the chamber so that one of the diaphragms is received within the cavity and the other diaphragm lies on the surface of the base and covers the hole. A conducting member extends from the sensor, through the hole to electronic circuitry mounted to the capsule. The cavity also has a land for supporting the diaphragm disposed therein.
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