Method for attaching a micromechanical device to a manifold, and fluid control system produced thereby
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United States of America Patent
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Dec 4, 2001
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N/A
app pub date -
Feb 14, 2000
filing date -
Feb 14, 2000
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Abstract
A method of attaching a micromechanical fluid control device to a substrate includes the steps of forming a first ring of a first adhesive around an aperture defined between a micromechanical fluid control device and a substrate. The first adhesive forms a first interface between the micromechanical fluid control device and the substrate that is clean and corrosion resistant. A second ring of a second adhesive is applied around the first ring. The second adhesive forms a second interface between the micromechanical fluid control device and the substrate that is hermetic.
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