Importance

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Abstract

A SMIF box cover hold down latch and box door latch actuating mechanism installed in the port door of a SMIF system has two box door latch actuating pins extending from a central pivot shaft of the actuating mechanism to mate with corresponding holes in the cam component of the box door latch mechanism. In a preferred embodiment the central pivot shaft moves about a central pivot axis between first and second predetermined angular positions. Movement to the first angular position imparts linear movement of trucks attached to first and second rod members and causes push pins to retract from their corresponding box cover hold down latches to secure the box cover to the port plate and imparts angular movement to the two actuating pins and causes them to operate the box door latch mechanism to release the box door from the box cover. Movement to the second angular position imparts linear movement to trucks attached to first and second rod members and causes push pins to extend toward and contact their corresponding box cover hold down latches to release the box cover from the port plate and imparts angular movement to the two actuating pins and causes them to operate the box door latch mechanism to secure the box door to the box cover. Multiple wafer registration detector subassemblies ensure that semiconductor wafers stored in a cassette holder contained within the SMIF box are properly registered before an elevator assembly moves the cassette holder beneath a SMIF system processing station canopy.

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First Claim