Method for two dimensional adaptive process control of critical dimensions during spin coating process
Number of patents in Portfolio can not be more than 2000
United States of America Patent
Stats
-
Dec 11, 2001
Grant Date -
N/A
app pub date -
Mar 20, 2000
filing date -
Mar 20, 2000
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A process for drying a polymeric material present on a substrate is provided. Temperatures of the polymeric material is measured and the ambient temperature in the vicinity of the substrate. A temperature of the substrate is also measured. A variation in the measured ambient temperature is detected. The substrate temperature, polymeric temperature, ambient temperature or a substrate drying spin speed is adjusted in response to the detected variation in the measured ambient temperature.
First Claim
Family
International Classification(s)
- [Classification Symbol]
- [Patents Count]
Cited Art Landscape
Patent Citation Ranking
Advertisement
Advertisement
Advertisement
Recipient Email Address
Recipient Email Address
Comment
Recipient Email Address
Add to Portfolio(s)
To add this patent to one, or more, of your portfolios, simply click the add button.
This Patent is in these Portfolios:
Add to additional portfolios:
Last Refreshed On:
Changes done successfully