Bias charge regulator for capacitive micromachined ultrasonic transducers
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United States of America Patent
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Dec 11, 2001
Issued Date -
N/A
app pub date -
Oct 27, 2000
filing date -
Jun 15, 2000
priority date (Note) -
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Abstract
An ultrasonic transducer is formed by a plurality of cMUT cells, each comprising a charged diaphragm plate capacitively opposing an oppositely charged base plate. A feedback controlled bias charge regulator controls the bias charge of the capacitive plates. The cMUT cells can be fabricated by conventional semiconductor processes and hence integrated with ancillary transducer circuitry such as the bias charge regulator.
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