Contact temperature probe with thermal isolation

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United States of America Patent

PATENT NO 6332709
SERIAL NO

09495704

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Abstract

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A contact temperature probe having a probe head which includes a temperature sensor having lead wires which exit the head and run through a shield for shielding the wires from the process, wherein the probe head is supported for pivoting motion only by the lead wires and the shield is thermally isolated from the probe head.

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Patent Owner(s)

Patent OwnerAddress
LAM RESEARCH CORPORATION4650 CUSHING PARKWAY FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Burke, John W McLean, VA 2 7
Cardoso, Andre B Braga, PT 1 4
McGinnity, Joseph G Gaithersburg, MD 1 4

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