Process for the production of an organic electroluminescent device

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United States of America Patent

PATENT NO 6333065
SERIAL NO

09116965

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An apparatus and a process for the production of an organic EL device, which permits a high freedom of apparatus designing, permits effective processing and gives an organic EL device having a high light emission efficiency and excellent device characteristics, the apparatus comprising means of cleaning a surface of a substrate on which at least a hole-injecting electrode is formed, and means of forming an organic layer on the cleaned surface of the substrate, the cleaning means being for performing the cleaning with ozone gas generated with the ozonizer.

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Patent Owner(s)

  • TDK CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arai, Michio Tokyo, JP 148 4016
Nakaya, Kenji Chiba, JP 41 1325

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