Standard for calibrating and checking a surface inspection device and method for the production thereof
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United States of America Patent
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Dec 25, 2001
Grant Date -
N/A
app pub date -
Nov 12, 1999
filing date -
Mar 6, 1997
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
The invention relates to a reproducible standard for calibrating and checking the bright-field channel of a surface inspection device used for examining the flat surface of a sample and to a method for producing said standard whereby a microstructure is produced on a surface of a substrate provided as a standard, characterized in that the microstructure is smoothed out.
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