Method and apparatus for handling deadlocks in multiple chamber cluster tools
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United States of America Patent
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Jan 1, 2002
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N/A
app pub date -
May 7, 1998
filing date -
May 7, 1998
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Expired
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Abstract
A method and apparatus for handling deadlocks in a multichamber semiconductor wafer processing system known as a cluster tool. A plurality of software routines execute upon a sequencer of a cluster tool to perform deadlock avoidance, deadlock detection and deadlock resolution towards achieving optimal wafer throughput for a cluster tool.
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