Process for treating waste water containing hydrofluoric acid and mixed acid etchant waste
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United States of America Patent
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Jan 15, 2002
Grant Date -
N/A
app pub date -
Aug 30, 1999
filing date -
Aug 30, 1999
priority date (Note) -
Expired
status (Latency Note)
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Abstract
A process for treating waste water containing hydrofluoric acid, mixed acid etchant waste, dissolved silica, and solid particles is provided. This process involves adjusting the pH of the waste water to about 7 or above, filtering the waste water to remove solid particles, adding an anti-scalant to the waste water, and feeding the waste water through a reverse osmosis membrane. The reverse osmosis membrane separates the waste water into a permeate stream, which is the product, and a reject stream. Another aspect of the present invention is a system for performing this process.
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