Electrostatic inkjet head having an accurate gap between an electrode and a diaphragm and manufacturing method thereof
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United States of America Patent
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Jan 29, 2002
Grant Date -
N/A
app pub date -
Sep 22, 1999
filing date -
Sep 24, 1998
priority date (Note) -
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Abstract
An electrostatic inkjet head has an accurately controlled, uniform gap between a diaphragm and an electrode. The gap between the electrode and the diaphragm is defined by a depth of a depression formed in the diaphragm substrate or the electrode substrate. The depression is formed by removing an oxidation layer which is formed by selectively oxidizing a portion of the diaphragm substrate or the electrode substrate. The depth of the depression is determined by a thickness of a portion of the oxidation layer, which portion extends from a surface of the diaphragm substrate or the electrode surface. Since the thickness of the oxidation layer is accurately controlled, the depth of the depression is also accurately controlled. Accordingly, a dimension of the gap between the diaphragm and the electrode is extremely accurate.
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