Lift and rotate assembly for use in a workpiece processing station and a method of attaching the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 6342137
SERIAL NO

09604198

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A lift and rotate assembly for use in a workpiece processing station. The lift and rotate assembly includes a body having a slim profile and pins located on opposite sides for mounting the assembly onto a tool frame. The lift and rotating assembly further includes a rotating mechanism coupling a processing head to the body, and for rotating the process head with respect to the body. The rotating mechanism includes a motor, wherein the motor is located within the processing head and the shaft of the motor is coupled to and rotationally fixed with respect to the body. The lift and rotate assembly further includes a lift mechanism for lifting the process head with respect to the body. A cable assembly within the lift and rotate assembly includes a common cable loop for feeding additional length of cable along both the lift direction and the rotational direction of movement.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bleck, Martin C Eagle, ID 11 294
Woodruff, Daniel J Kalispell, MT 104 2666

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