Importance

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Abstract

An apparatus for jetting a fluid to an exterior through a nozzle by exerting a driving force to the fluid held within a jetting fluid chamber and method of manufacturing the same. The apparatus employs an electrostatic force as the driving force for a driving part which is to be exerted to the fluid. The driving part for exerting the driving force to the fluid has upper and lower electrodes which are oppositely spaced apart from each other at a predetermined distance. The upper electrode is disposed within the interior of a membrane. Here, the membrane forms the lower surface of the jetting fluid chamber. Accordingly, the membrane is driven by the upper electrode which is displaced upward and downward due to the electrostatic force generated between the upper and lower electrodes, so that the driving force is exerted to the fluid within the jetting fluid chamber, and the fluid is jetted to the exterior through the nozzle.

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First Claim