Computer controlled temperature and oxygen maintenance for fiber coating CVD
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United States of America Patent
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Feb 5, 2002
Grant Date -
N/A
app pub date -
Jul 29, 1999
filing date -
Jul 30, 1998
priority date (Note) -
Expired
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Abstract
Computer controlled fiber coating chemical vapor deposition system and method for generating substantially uniform coated fibers by maintaining chemical vapor deposition reactor temperature in real time. Reactor temperature is monitored by in situ temperature sensors. Reactor temperature is sensitive to oxygen levels and oxygen levels within the reactor are varied in response to temperature sensor data. Closed loop process control software maintains reactor temperature at a preselected value resulting in predictable fiber coatings of a preselected thickness, crystallinity and chemistry.
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